Illumination device for a DUV microscope and DUV microscope

US6624930B1 · kind B1 · utility

Assignee

• Leica Microsystems Wetzlar GmbH · DE

Inventors

• Lambert Danner · Wetzlar, DE
• Frank Eisenkrämer · Biebertal, DE
• Michael Veith · Sankt Ingbert, DE
• Wolfgang Vollrath · Burbach, DE
• Martin Osterfeld · Bietigheim-Bissingen, DE

Key dates

• Filing date: Jun 8, 2000
• Grant date: Sep 23, 2003
• Expiry date: May 16, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/16
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An illumination device for a DUV microscope has an illumination beam path, proceeding from a DUV light source in which are arranged a condenser and a reflection filter system which generates a DUV wavelength band and comprises four reflection filters. At these, the illumination beam is reflected in each case at the same reflection angle &agr;, the illumination beam path extending coaxially in front of and behind the reflection filter system. According to the present invention, the reflection angle &agr;=30° and the DUV wavelength band &lgr;DUV+&Dgr;&lgr; has a half-value width of max. 20 nm and a peak with a maximum value S of more than 90% of the incoming light intensity. The resulting very narrow half-value width of the DUV wavelength band makes it possible for the DUV objectives of the DUV microscope to be very well-corrected.