Lambert Danner
16Patents
6h-index
27Co-inventors
66Inventor score
Filing activity: Nov 16, 1981 → Feb 14, 2011
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6600560B2 | Optical measurement arrangement having an ellipsometer | Physics | 34 | Expired |
| US7271889B2 | Device and method for inspecting an object | Physics | 19 | Expired |
| US6879440B2 | Autofocus module and method for a microscope-based system | Physics | 15 | Expired |
| US6624930B1 | Illumination device for a DUV microscope and DUV microscope | Physics | 15 | Expired |
| US8154718B2 | Apparatus and method for inspecting micro-structured devices on a semiconductor substrate | Physics | 12 | Expired |
| US9091525B2 | Method for focusing an object plane and optical assembly | Physics | 8 | Active |
| US7420670B2 | Measuring instrument and method for operating a measuring instrument for optical inspection of an object | Physics | 5 | Expired |
| US4417787A | Five-component microscope objective | Physics | 4 | Expired |
| US6975409B2 | Illumination device; and coordinate measuring instrument having an illumination device | Physics | 3 | Expired |
| US6618154B2 | Optical measurement arrangement, in particular for layer thickness measurement | Physics | 3 | Expired |
| US7268940B2 | Illuminating device | Physics | 2 | Expired |
| US7209243B2 | Illumination device, and coordinate measuring instrument having an illumination device | Physics | 2 | Expired |
| US8451440B2 | Apparatus for the optical inspection of wafers | Physics | 2 | Active |
| US4384765A | Six-component microscope objective | Physics | 1 | Expired |
| US6943901B2 | Critical dimension measuring instrument | Physics | 0 | Expired |
| US7561263B2 | Apparatus for illuminating and inspecting a surface | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.