Micrometric actuation, hard disk read/write unit with a flexure and microactuator formed in a monolithic body of semiconductor material
US6624981B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 23, 2000 |
| Grant date | Sep 23, 2003 |
| Priority date | — |
| Expiry date | Feb 23, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/725
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A hard disk read/write unit is formed in a monolithic body of semiconductor material, including a suspension structure, a coupling or flexure element integral with the suspension structure, and a microactuator, integral with the coupling. The monolithic body has a first portion accommodating integrated electronic components, and a second portion, accommodating the coupling and the microactuator. The coupling is formed from a central region, accommodating the microactuator; an annular region, separated from the central region by a first trench, and from the suspension by a second trench; a first pair of suspension arms, extending between the central region and the annular region, along a first axis; and a second pair of suspension arms, extending between the annular region and the suspension structure, along a second axis perpendicular to the first axis. The first and second pair of arms, with a reduced thickness, impart to the coupling yielding for rotations around the first and second axes of the central region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.