Plasma generator assembly for use in CVD and PECVD processes
US6626998B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 8, 2000 |
| Grant date | Sep 30, 2003 |
| Priority date | — |
| Expiry date | Apr 14, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3244
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An RF electrode module for use with a gas-diffuser showerhead device in a CVD chamber has an electrically-conductive electrode ring with a ring, inside diameter (R-ID) and a ring outside diameter (R-OD). The ring has an upwardly-extending power post, and an internal water-cooling channel open to an upwardly extending inlet tube and an upwardly-extending outlet tube, the post and tubes parallel to a central axis of the ring. There is further an electrical-insulator ring having an insulator outside diameter (I-OD) equal to or greater than the R-OD and an insulator inside diameter (I-ID) equal to or smaller than the R-ID, and through-openings extending in the direction of the central axis of the ring and spaced such that the power post, inlet tube, and outlet tube extend through the through-openings in the insulator ring. In a preferred embodiment the I-ID is sized to engage a shoulder diameter of the gas diffuser showerhead device. The disclosure also teaches a split nut for providing a secure and removable connection of a fluid-supply apparatus to a tube in a manner to withstand substantial internal fluid pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.