Patent · US Expired

Apparatus and methods for performing self-clearing optical measurements

US6628397B1 · kind B1 · utility

35Cited by
33References
27Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 15, 1999
Grant dateSep 30, 2003
Priority date
Expiry dateSep 15, 2019

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01B11/0683
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Disclosed is a self-clearing objective for directing a beam towards a sample and clearing away debris from an optical viewing path adjacent to the sample. The self-clearing objective includes an optical element and a substantially transparent fluid flowing between the optical element and the sample such that at least a portion adjacent to the sample is substantially cleared of debris. The optical element and the fluid cooperatively direct the beam towards the sample. This self-clearing objective may be coupled with various measurement devices to measure various characteristics of samples having debris that prevents clear optical measurements. Additionally, the measurement device may be integrated with or coupled to various sample processing systems so that the relevant process may be clearly monitored.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.