Level control systems for high purity chemical delivery systems
US6629627B1 · kind B1 · utility
15Cited by
14References
14Claims
0Family size
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Key dates
| Filing date | Jan 26, 1998 |
| Grant date | Oct 7, 2003 |
| Priority date | — |
| Expiry date | Jun 19, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7368
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.