Compact, high collection efficiency scintillator for secondary electron detection
US6630667B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 29, 2000 |
| Grant date | Oct 7, 2003 |
| Priority date | — |
| Expiry date | Jun 9, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2443
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A scintillator assembly used in a FIB (Focused Ion Beam) system to detect secondary electrons achieves nearly 100 percent collection efficiency for the majority of useful secondary electron energy ranges. Further, the insulator in the assembly is placed such that it is completely out of the secondary electron path in order to avoid arcing which affects FIB secondary electron imaging. Also, the gap between the grounding cap and the scintillator allows high collection efficiency offered by earlier designs to be retained, and at the same time, improves the system reliability. Further, the scintillator assembly may be placed closer to the primary ion beam, which further improves collection efficiency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.