Mixing manifold for multiple inlet chemistry fluids
US6632012B2 · kind B2 · utility
5Cited by
92References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 30, 2001 |
| Grant date | Oct 14, 2003 |
| Priority date | — |
| Expiry date | Apr 30, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01F35/717
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Exemplary methods, systems and apparatus are provided for accomplishing mixing of chemistries, such as those used in polishing materials used in semiconductor manufacturing. A manifold is provided that combines chemistries with a mixing element, for example, so that the stability of the chemical solution can be maintained so as to facilitate polishing. The mixing element can be oriented in a stationary position, or alternatively, it can be agitated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.