Michael Vogtmann
17Patents
6h-index
17Co-inventors
63Inventor score
Filing activity: Feb 9, 1999 → Nov 21, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6672943B2 | Eccentric abrasive wheel for wafer processing | Electricity | 48 | Expired |
| US6131589A | Accurate positioning of a wafer | Emerging Cross-Sectional Technologies | 23 | Expired |
| US6645046B1 | Conditioning mechanism in a chemical mechanical polishing apparatus for semiconductor wafers | Performing Operations; Transporting | 20 | Expired |
| US6102057A | Lifting and rinsing a wafer | Emerging Cross-Sectional Technologies | 15 | Expired |
| US6267642A | Sensing the presence of a wafer | Emerging Cross-Sectional Technologies | 13 | Expired |
| US6405740B1 | Accurate positioning of a wafer | Emerging Cross-Sectional Technologies | 6 | Expired |
| US6505635B1 | Lifting and rinsing a wafer | Emerging Cross-Sectional Technologies | 6 | Expired |
| US6283827A | Non-contacting support for a wafer | Emerging Cross-Sectional Technologies | 5 | Expired |
| US6632012B2 | Mixing manifold for multiple inlet chemistry fluids | Performing Operations; Transporting | 5 | Expired |
| US8133093B2 | Grinding apparatus having an extendable wheel mount | Performing Operations; Transporting | 4 | Active |
| US8968052B2 | Systems and methods of wafer grinding | Performing Operations; Transporting | 4 | Active |
| US8520222B2 | System and method for in situ monitoring of top wafer thickness in a stack of wafers | Physics | 4 | Active |
| US8915771B2 | Method and apparatus for cleaning grinding work chuck using a vacuum | Performing Operations; Transporting | 3 | Active |
| US6796881B1 | Sensing the presence of a wafer | Emerging Cross-Sectional Technologies | 3 | Expired |
| US7345466B2 | Method and apparatus for cleaning a probe card | Physics | 2 | Expired |
| US9393669B2 | Systems and methods of processing substrates | Performing Operations; Transporting | 2 | Active |
| US12183597B2 | Fluid delivery system | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.