Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same
US6632549B1 · kind B1 · utility
47Cited by
6References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 17, 2000 |
| Grant date | Oct 14, 2003 |
| Priority date | — |
| Expiry date | Jul 17, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/265
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
This invention relates to a corrosion-resistant member having a resistance to plasma of a halogen based corrosive gas, which comprises a main body and a corrosion-resistant layer formed on a surface of the main body and containing a fluoride of at least one element selected from the group consisting of rare earth elements and alkaline earth elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.