Solenoid electron beam lenses with high demagnification and low aberrations
US6633040B1 · kind B1 · utility
1Cited by
6References
13Claims
0Family size
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Key dates
| Filing date | Apr 25, 2002 |
| Grant date | Oct 14, 2003 |
| Priority date | — |
| Expiry date | Apr 25, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31793
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A magnetic lens employs a solenoid field containing a passive pole piece that shapes the solenoid field to create a demagnifying lens that has very low geometrical aberrations by adjusting the field upstream and downstream of the gap between the pole pieces to create a negative term in the formula for spherical aberrations, subtracting a significant amount from the contribution to the aberrations that comes from the field in the gap.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.