Focused ion-beam fabrication of fiber probes for use in near field scanning optical microscopy
US6633711B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 1, 2000 |
| Grant date | Oct 14, 2003 |
| Priority date | — |
| Expiry date | Jun 1, 2020 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y35/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method of forming a fiber probe having an aperture for use in near-field scanning optical microscopy. The method includes a first steps of coating an optical fiber having a tapered tip with a metal layer. Next is a step of milling the tapered tip and metal layer such that an aperture is formed through the metal layer at the tapered tip. The milling step includes focused ion-beam milling the tapered tip and metal layer. The focused ion-beam milling can be done by raster scanning the focused ion-beam in a rectangular pattern at an apex of the tapered tip. Also, the fiber probe made through the above outlined method is used in near-field scanning optical microscopy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.