On-chip capacitor
US6635916B2 · kind B2 · utility
31Cited by
14References
13Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 23, 2001 |
| Grant date | Oct 21, 2003 |
| Priority date | — |
| Expiry date | Aug 23, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/212
Abstract
An on-chip analog capacitor. Metal interconnect structures are used to form the capacitor, and the interdigitated fingers of like polarity within the interconnect structure are connected above and below to one another by metal vias to form a wall of metal which increases total capacitance by taking advantage of the via sidewall capacitance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.