Probe card with contact apparatus and method of manufacture

US6636063B2 · kind B2 · utility

Assignee

• TEXAS INSTRUMENTS INCORPORATED · US

Inventors

• Richard W. Arnold · Austin, US
• James A. Forster · Barrington, US
• Reynaldo Rincon · Richardson, US
• Lester Wilson · Sherman, US

Key dates

• Filing date: Oct 2, 2001
• Grant date: Oct 21, 2003
• Expiry date: Oct 2, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R3/00
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A probe card having reliable “micro probe” contacts which include a base and an angled probe tip fabricated as a single unit from a thin sheet of a conductive metal having high tensile and yield strength, and coated with a noble metal. The micro probes are secured into precisely dimensioned, and positioned locations on the card, and are electrically connected to traces on the card. Design of the micro probes includes not only the base and probe tip, but also locking features, a stand-off to prevent over compression, and a necked down stem feature for release from the support strap used in transporting and plating during the manufacturing processes.