Linear motor stage system for use in exposure apparatus
US6639333B1 · kind B1 · utility
8Cited by
6References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 19, 2000 |
| Grant date | Oct 28, 2003 |
| Priority date | — |
| Expiry date | Jul 19, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K41/03
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A linear motor includes a magnet, a coil, and a jacket having an inside member that is comb-shaped having teeth, extending along a driving direction. The coil is engaged by the teeth of the comb-shaped member. A cooling medium flows through an inside space enclosed by the jacket. Unwanted deformation or breakage of the jacket can be avoided even if the pressure of the cooling medium is enlarged or the thickness of a small-thickness portion of the jacket is made smaller. A higher cooling efficiency is thus attainable by increasing the flow rate of the cooling medium.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.