Device having a barrier layer located therein and a method of manufacture therefor
US6639724B2 · kind B2 · utility
32Cited by
4References
20Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jun 5, 2001 |
| Grant date | Oct 28, 2003 |
| Priority date | — |
| Expiry date | Jun 28, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3594
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A device for use in a micro-electro-mechanical system (MEMS) optical device. The device includes a substrate having opposing first and second sides and a diffusion barrier layer formed over at least the first side. The device further includes a light reflective optical layer formed over the diffusion barrier layer on the first side of the substrate. The second side may desirably have a stress balancing layer located thereover.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.