Delivery of liquid precursors to semiconductor processing reactors
US6640840B1 · kind B1 · utility
33Cited by
17References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 21, 2000 |
| Grant date | Nov 4, 2003 |
| Priority date | — |
| Expiry date | Sep 21, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E60/34
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
This invention relates to methods and apparatus for delivering liquid precursors to semi-conductor processing apparatus. The liquid precursor delivery system is generally indicated at (10) and includes a source (11), an inlet tube (12), a two-way valve (13), a pump assembly (14), an outlet tube (15), a shut-off valve (16) and a flash evaporator (17). The pump assembly (14) is in the form of a syringe or variable volume pump and is controlled by a combination of a step motor (27) and a linear encoder (30). The arrangement is such that unused liquid precursor can be returned to the source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.