Patent · US Expired

Docking station for substrate transport containers

US6641348B1 · kind B1 · utility

18Cited by

13References

18Claims

0Family size

Assignee

Brooks Automation GmbH · US

Inventors

Klaus Schultz · Jena, DE
Alfred Schulz · Oberriexingen, DE
Marlies Mages · Jena, DE

Key dates

Filing date	Nov 2, 1998
Grant date	Nov 4, 2003
Priority date	—
Expiry date	Nov 2, 2018

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S414/135
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A device for coupling containers at a loading and unloading port with a horizontally displaceable platform for receiving the container has the object of increasing protection against faulty operation and faulty loading in a simple manner while guaranteeing technical cleanroom requirements and without limiting the clear space of the platform. An arrangement for detecting the presence of a container and for distinguishing between containers with different contents is provided for an expectancy area above the platform. The device is used for the loading and unloading at machining or processing stations of objects that are to be transported in a container, especially objects in the fabrication process for integrated circuits.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.