Wafer container cushion system
US6644477B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 11, 2002 |
| Grant date | Nov 11, 2003 |
| Priority date | — |
| Expiry date | Dec 11, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67369
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer container having a container portion with an open front for receiving and removal of wafers includes a door with a cushion system that utilizes a unique wafer restraint system and structural features to provide maximum protection for the wafers and preventing rotation of said wafers. A feature of the door is that the front of the door covers have a pair of latch cavities on the outwardly facing side of the door. The latch cavities for receiving two latch mechanisms with latch members that extend out the upper and lower peripheral edge of the door. The latch mechanisms are covered by a pair of door panels that utilize hooks that attach to the peripheral edge of the door and further attach with posts near the vertical midsection. The latch cover at the peripheral side edge and at the vertical midsection of the door provides stiffness and resistance to bending of the door. In a preferred embodiment, the attachment of the door panel at the peripheral edge utilizes hook members on the door panel that extend through slots on the peripheral side. Press fit connectors and aperture combinations are preferably utilized to connect the edge of the latch panel approximate the mid-portio…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.