System for fabricating a metal/anti-reflective coating/insulator/metal (MAIM) capacitor

US6645804B1 · kind B1 · utility

Assignee

• TEXAS INSTRUMENTS INCORPORATED · US

Inventors

• F. Scott Johnson · Plano, US
• Luigi Columbo · Dallas, US
• Doug Prinslow · McKinney, US
• Kelly Taylor · Allen, US
• Van-Joy Tsai · Richardson, US

Key dates

• Filing date: May 1, 2002
• Grant date: Nov 11, 2003
• Expiry date: May 1, 2022

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D84/212

Abstract

Disclosed is a system for fabricating an integrated circuit capacitor (100). An electrode layer (102) is formed in the integrated circuit. An anti-reflective coating (108) is deposited over the electrode layer (102). An electrode top plate (104) is formed over the anti-reflective coating (108).