Method and apparatus for presenting process control performance data
US6646660B1 · kind B1 · utility
135Cited by
4References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 29, 2000 |
| Grant date | Nov 11, 2003 |
| Priority date | — |
| Expiry date | Feb 8, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B23/0267
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method for presenting performance data from a process flow includes providing a tool link associated with a first subset of the performance data for at least one tool in the process flow; providing a recipe link associated with a second subset of the performance data for at least one recipe in the process flow; displaying the first subset of the performance data in response to the tool link being selected; and displaying the second subset of the performance data in response to the recipe link being selected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.