Lithographic projection apparatus positioning system, method of manufacturing, device manufactured thereby and computer program
US6646721B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 18, 2002 |
| Grant date | Nov 11, 2003 |
| Priority date | — |
| Expiry date | Mar 18, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/709
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A lithographic apparatus has a positioning system for positioning an object table. The positioning system includes a planar motor having a stator and a translator, one comprising a periodic magnet structure and the other comprising a plurality of coils. The phase relationship between the stator and translator is determined by energizing at least some of the coils with an oscillating signal sufficient to cause vibrations of the translator, measuring the vibrations, and determining the phase relationship between the translator and stator on the basis of the measured vibrations. Alternatively, the relationship between stator and translator may be determined by detecting distinct optical marks on the periodic magnet array.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.