Capacitive physical load sensor and detection system
US6647795B2 · kind B2 · utility
4Cited by
7References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 30, 2002 |
| Grant date | Nov 18, 2003 |
| Priority date | — |
| Expiry date | May 30, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L1/148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive physical load sensor includes a substrate, which has fixed electrodes, and a diaphragm, which has movable electrodes. The diaphragm is located across a gap from the substrate, and retaining parts for the diaphragm are formed around the diaphragm. Protruding parts extend into the gap from the diaphragm or from the substrate. The protruding parts support the diaphragm at different levels of deformation to alter the characteristics of the diaphragm and extend its range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.