Apparatus for conditioning the atmosphere in a vacuum chamber
US6649019B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 19, 2001 |
| Grant date | Nov 18, 2003 |
| Priority date | — |
| Expiry date | May 1, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/86139
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
In the invention, the atmosphere in a vacuum chamber (1) is conditioned using a primary pump (3), a secondary pump (2), speed control means (6, 7) for controlling the speed of the primary pump, and at least first gas treatment means (5) adapted for treating the extracted gases downstream from the primary pump (3). The vacuum chamber (1) is contained in a room (130) having a false floor (36) covering a space (37). The primary pump (3) and the gas treatment means (5) are housed in the available space (37) under the false floor (36), so that the secondary pump (2) can be placed in the immediate vicinity of the vacuum chamber (1), and the primary pump (3) is in the proximity of the vacuum chamber (1).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.