Micromechanical diaphragm

US6649989B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Hubert Benzel · Neckartenzlingen, DE
• Frank Schaefer · Lörrach, DE

Key dates

• Filing date: Oct 3, 2001
• Grant date: Nov 18, 2003
• Expiry date: Oct 3, 2021

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/0127
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromechanical diaphragm is described which has a partially n-doped p-substrate on its surface and a top n-epitaxial layer, one or more n-epitaxial layers which are p-doped in the diaphragm area being arranged on the p-substrate.