Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system
US6650409B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 14, 1996 |
| Grant date | Nov 18, 2003 |
| Priority date | — |
| Expiry date | Mar 14, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/0225
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor device producing method and a semiconductor device producing system employs a processing apparatus provided with a dust particle detecting apparatus. The dust particle detecting apparatus measures the condition of adhesion of dust particles adhering to a work at least before or after processing the work, manages the condition of incremental adhesion of dust particles to the work resulting from processing for each lot of works or for each work on the basis of the measured condition of adhesion of dust particles measured before or after processing the work, and determines the time when the processing apparatus is to be cleaned or the cycle of cleaning the processing apparatus on the basis of the managed condition of adhesion of dust particles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.