High conformality antireflective coating compositions
US6653049B2 · kind B2 · utility
33Cited by
22References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 17, 2001 |
| Grant date | Nov 25, 2003 |
| Priority date | — |
| Expiry date | Feb 17, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/091
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention provides new light absorbing compositions suitable for use as antireflective coating compositions (“ARCs”), particularly for deep UV applications. The antireflective compositions of the invention in general comprise a resin binder component that contains a high molecular weight polymer, e.g. a polymer having an Mw of at least about 40,000 daltons. ARCs of the invention exhibit exceptional conformality upon application to a substrate surface. For example, ARCs of the invention can coat substantial topography such as vertical and sloping steps with high conformality.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.