High temperature EUV source nozzle
US6657213B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 3, 2001 |
| Grant date | Dec 2, 2003 |
| Priority date | — |
| Expiry date | Nov 23, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05G2/0023
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A nozzle (46) for a laser-plasma EUV radiation source that provides thermal isolation between the nozzle body (48) and the target material flowing therethrough. A target delivery tube (72) is provided that extends through the nozzle body (48). The delivery tube (72) has an expansion aperture (80) positioned behind an exit collimator (50) of the nozzle body (48). The delivery tube (72) is made of a low thermal conductivity material, such as stainless steel, and is in limited contact with the nozzle body (48) so that heating of the nozzle body (48) from the plasma does not heat the liquid target material being delivered through the delivery tube (72). The expansion aperture (80) has a smaller diameter than the exit collimator (50).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.