Inventor · Corning, CA, US

Roy D. McGregor

7Patents
5h-index
7Co-inventors
45Inventor score

Filing activity: Apr 25, 2000 → Dec 11, 2002

Most-cited inventions

PatentTitleAreaCited byStatus
US6324256A Liquid sprays as the target for a laser-plasma extreme ultraviolet light source Electricity 20 Expired
US6738452B2 Gasdynamically-controlled droplets as the target in a laser-plasma extreme ultraviolet light source Electricity 16 Expired
US6661018B1 Shroud nozzle for gas jet control in an extreme ultraviolet light source Electricity 12 Expired
US6835944B2 Low vapor pressure, low debris solid target for EUV production Electricity 9 Expired
US6657213B2 High temperature EUV source nozzle Electricity 6 Expired
US6912267B2 Erosion reduction for EUV laser produced plasma target sources Electricity 4 Expired
US6864497B2 Droplet and filament target stabilizer for EUV source nozzles Physics 3 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.