Roy D. McGregor
7Patents
5h-index
7Co-inventors
45Inventor score
Filing activity: Apr 25, 2000 → Dec 11, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6324256A | Liquid sprays as the target for a laser-plasma extreme ultraviolet light source | Electricity | 20 | Expired |
| US6738452B2 | Gasdynamically-controlled droplets as the target in a laser-plasma extreme ultraviolet light source | Electricity | 16 | Expired |
| US6661018B1 | Shroud nozzle for gas jet control in an extreme ultraviolet light source | Electricity | 12 | Expired |
| US6835944B2 | Low vapor pressure, low debris solid target for EUV production | Electricity | 9 | Expired |
| US6657213B2 | High temperature EUV source nozzle | Electricity | 6 | Expired |
| US6912267B2 | Erosion reduction for EUV laser produced plasma target sources | Electricity | 4 | Expired |
| US6864497B2 | Droplet and filament target stabilizer for EUV source nozzles | Physics | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.