Close coupled match structure for RF drive electrode
US6657395B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 12, 2003 |
| Grant date | Dec 2, 2003 |
| Priority date | — |
| Expiry date | Feb 12, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3323
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electrode assembly for supplying RF power from a RF power source having an output impedance to an electrically non-linear medium, the assembly being composed of: a drive electrode in communication with the medium and forming with the medium a load impedance; and an impedance match network coupled between the RF power source and the drive electrode for matching the output impedance of the RF source to the load impedance. The match network has an output component that is directly connected to the drive electrode. The electrode assembly can further have a body of RF energy absorbing material disposed between the match network and the drive electrode, the absorbing material having a frequency dependent energy absorption characteristic which increases with frequency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.