Illumination system with variable adjustment of the illumination
US6658084B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 25, 2001 |
| Grant date | Dec 2, 2003 |
| Priority date | — |
| Expiry date | Oct 25, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K5/04
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An illumination system comprises (a) a first optical element upon which a light beam impinges, where the first optical element has first raster elements that partition said light beam into light channels; (b) a second optical element that receives said light channels, where the second optical element has a second raster elements; (c) an object plane that receives said light channels via said second optical element; and (d) an exit pupil that is provided with an illumination via said object plane. The system is characterized by an assignment of a member of said first raster elements and a member of said second raster elements to each of said light channels to provide a continuous beam path from said first optical element to said object plane for each of said plurality of light channels. The assignment is changeable to provide an adjustment of said illumination in said exit pupil.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.