Process for producing magnetic head suspension
US6658722B1 · kind B1 · utility
9Cited by
7References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 15, 1999 |
| Grant date | Dec 9, 2003 |
| Priority date | — |
| Expiry date | Dec 15, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49032
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
(a) A method of manufacturing a magnetic head suspension includes a polyimide precursor layer 2 that is formed over a springy material layer 1, (b) a metal layer 3 for lines is formed over the polyimide precursor layer 2, (c) the metal layer 3 is patterned by the subtractive process to produce lines 4, (d) the polyimide precursor layer 2 is patterned by a photolithographic technique to give the configuration corresponding to a polyimide insulating base layer 5, (e) the patterned polyimide precursor layer 2 is imidated to produce the polyimide insulating base layer 5, and (f) a cover coat layer 6 is formed over the lines 4.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.