Seed layer repair bath
US6660153B2 · kind B2 · utility
10Cited by
4References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 17, 2001 |
| Grant date | Dec 9, 2003 |
| Priority date | — |
| Expiry date | Feb 9, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/244
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Disclosed are methods for repairing seed layers prior to subsequent metallization during the manufacture of electronic devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.