Method of measuring oscillatory semiconductor membranes and shielding for external excitations in the measurement

US6662661B2 · kind B2 · utility

Assignee

• Leica Microsystems Semiconductor GmbH · DE

Inventors

• Gerd Stach · Hüttenberg, DE
• Thomas Struck · Olching, DE

Key dates

• Filing date: Mar 18, 2002
• Grant date: Dec 16, 2003
• Expiry date: Mar 18, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F1/84
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The method enables optical measurements of an oscillatory, and particularly structured, membrane in an environment which is subjected to gas flows and/or acoustic excitations. A device for measuring the membrane is focused on the same. An optically transparent film is provided, and the film and the membrane are arranged in such a manner that the gas flows and/or the acoustic excitations reach the membrane only by passing through the film. The film enables a diminishing of the external air movements and thus oscillations of the membrane so that the membrane can be precisely measured.