Toroidal low-field reactive gas source
US6664497B2 · kind B2 · utility
17Cited by
104References
49Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 10, 2002 |
| Grant date | Dec 16, 2003 |
| Priority date | — |
| Expiry date | May 10, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32862
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.