Xing Chen
54Patents
22h-index
56Co-inventors
91Inventor score
Filing activity: Jan 19, 1995 → Jan 25, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5608526A | Focused beam spectroscopic ellipsometry method and system | Physics | 507 | Expired |
| US6150628A | Toroidal low-field reactive gas source | Electricity | 362 | Expired |
| US6815633B1 | Inductively-coupled toroidal plasma source | Electricity | 160 | Expired |
| US5910842A | Focused beam spectroscopic ellipsometry method and system | Physics | 124 | Expired |
| US5581350A | Method and system for calibrating an ellipsometer | Physics | 115 | Expired |
| US5771094A | Film measurement system with improved calibration | Physics | 115 | Expired |
| US6734967B1 | Focused beam spectroscopic ellipsometry method and system | Physics | 103 | Expired |
| US6268916A | System for non-destructive measurement of samples | Physics | 91 | Expired |
| US6388226B1 | Toroidal low-field reactive gas source | Electricity | 63 | Expired |
| US6924455B1 | Integrated plasma chamber and inductively-coupled toroidal plasma source | Electricity | 56 | Expired |
| US5792522A | High density plasma physical vapor deposition | Electricity | 52 | Expired |
| US6559408B2 | Toroidal low-field reactive gas source | Electricity | 52 | Expired |
| US7969096B2 | Inductively-coupled plasma source | Electricity | 52 | Active |
| US6872909B2 | Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel | Electricity | 40 | Expired |
| US8003935B2 | Chemical ionization reaction or proton transfer reaction mass spectrometry with a quadrupole mass spectrometer | Physics | 37 | Active |
| US8334505B2 | Chemical ionization reaction or proton transfer reaction mass spectrometry | Emerging Cross-Sectional Technologies | 36 | Active |
| US6552296B2 | Toroidal low-field reactive gas source | Electricity | 35 | Expired |
| US6486431B1 | Toroidal low-field reactive gas source | Electricity | 34 | Expired |
| US7166816B1 | Inductively-coupled torodial plasma source | Electricity | 32 | Expired |
| USD890406S1 | Rotating projection night light | General | 27 | Active |
| US7161112B2 | Toroidal low-field reactive gas source | Electricity | 25 | Expired |
| US7541558B2 | Inductively-coupled toroidal plasma source | Electricity | 22 | Active |
| US6664497B2 | Toroidal low-field reactive gas source | Electricity | 17 | Expired |
| US8124906B2 | Method and apparatus for processing metal bearing gases | Electricity | 15 | Active |
| US8704171B2 | Chemical ionization reaction or proton transfer reaction mass spectrometry | Emerging Cross-Sectional Technologies | 13 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.