Method for forming alignment layer by ion beam surface modification
US6665033B2 · kind B2 · utility
34Cited by
12References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 30, 2000 |
| Grant date | Dec 16, 2003 |
| Priority date | — |
| Expiry date | Jan 20, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/13378
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for preparing an alignment layer surface provides a surface on the alignment layer. The surface is bombarded with ions, and reactive gas is introduced to the ion beam to saturate dangling bonds on the surface. Another method for preparing an alignment layer surface provides a surface on the alignment layer. The surface is bombarded with ions and quenched with a reactive component to saturate dangling bonds on the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.