Inventor · Yorktown Heights, NY, US

Alan E. Rosenbluth

106Patents
22h-index
90Co-inventors
93Inventor score

Filing activity: Oct 26, 1979 → Aug 20, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US6377233B2 Micromechanical display and fabrication method Emerging Cross-Sectional Technologies 132 Expired
US4902899A Lithographic process having improved image quality Physics 118 Expired
US6563566B2 System and method for printing semiconductor patterns using an optimized illumination and reticle Physics 108 Expired
US5517340A High performance projection display with two light valves Physics 104 Expired
US6323834A Micromechanical displays and fabrication method Emerging Cross-Sectional Technologies 104 Expired
US5680588A Method and system for optimizing illumination in an optical photolithography projection imaging system Physics 102 Expired
US5921650A High efficiency field-sequential color projector using two SLMs Physics 87 Expired
US5621486A Efficient optical system for a high resolution projection display employing reflection light valves Electricity 64 Expired
US5777789A Efficient optical system for a high resolution projection display employing reflection light valves Electricity 51 Expired
US7079223B2 Fast model-based optical proximity correction Physics 49 Expired
US6869739B1 Integrated lithographic print and detection model for optical CD Physics 49 Expired
US7512927B2 Printability verification by progressive modeling accuracy Physics 48 Active
US6082861A Optical system and method for high contrast projection display Electricity 46 Expired
US5452090A CCD based confocal filtering for improved accuracy in x-ray proximity alignment Physics 45 Expired
US7010776B2 Extending the range of lithographic simulation integrals Physics 44 Expired
US5159172A Optical projection system Physics 44 Expired
US6665033B2 Method for forming alignment layer by ion beam surface modification Physics 34 Expired
US6052231A Beam dividing elements permitting projection of an image with high contrast Physics 32 Expired
US5786934A Efficient optical system for a high resolution projection display employing reflection light valves Electricity 28 Expired
US4896952A Thin film beamsplitter optical element for use in an image-forming lens system Physics 28 Expired
US7057709B2 Printing a mask with maximum possible process window through adjustment of the source distribution Physics 28 Expired
US6636276B1 Projection display system with at least two reflective light valves Electricity 27 Expired
US6193393A Apparatus and method for intensifying illumination brightness by time-superposing multiple pulsed light sources Physics 18 Expired
US5786873A Efficient optical system for a high resolution projection display employing reflection light valves Electricity 17 Expired
US5729383A Oblique viewing microscope system Physics 15 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.