Reinforced chemical mechanical planarization belt
US6666326B2 · kind B2 · utility
5Cited by
6References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 12, 2002 |
| Grant date | Dec 23, 2003 |
| Priority date | — |
| Expiry date | Mar 12, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24D11/005
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A processing belt for use in chemical mechanical planarization (CMP), and methods for making the same, is provided. Embodiments of the processing belt include a mesh belt, and a polymeric material encasing the mesh belt to define the processing belt. The processing belt is fabricated so that the mesh belt forms a continuous loop within the polymeric material, and the mesh belt is constructed as a grid of intersecting members. The intersecting members are joined at fixed joints to form a rigid support structure for the processing belt.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.