Patent · US Expired

Electronic device manufacture

US6667147B2 · kind B2 · utility

30Cited by
5References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 7, 2002
Grant dateDec 23, 2003
Priority date—
Expiry dateNov 7, 2022

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T428/24331
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Disclosed are methods of manufacturing electronic devices, particularly integrated circuits. Such methods include the use of low dielectric constant material prepared by using a removable porogen material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.