High performance silicon condenser microphone with perforated single crystal silicon backplate
US6667189B1 · kind B1 · utility
43Cited by
8References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 13, 2002 |
| Grant date | Dec 23, 2003 |
| Priority date | — |
| Expiry date | Sep 13, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49005
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A silicon condenser microphone is described. The silicon condenser microphone of the present invention comprises a perforated backplate comprising a portion of a single crystal silicon substrate, a support structure formed on the single crystal silicon substrate, and a floating silicon diaphragm supported at its edge by the support structure and lying parallel to the perforated backplate and separated from the perforated backplate by an air gap.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.