Film substrate treatment apparatus, film substrate treatment method, and film substrate transport method
US6667250B2 · kind B2 · utility
5Cited by
9References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 1, 2003 |
| Grant date | Dec 23, 2003 |
| Priority date | — |
| Expiry date | Apr 1, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
To provide a film substrate treatment apparatus that appropriately mounts film substrates on an electrostatic adsorption stage. In the film substrate treatment apparatus, adsorption pads are disposed on the first adsorption units that mount film substrates on an electrostatic stage, and a pressing member that presses the edge portion areas of the film substrates against the stage is provided. The film substrates can thereby be reliably attached to the stage, and the film substrates can be appropriately treated in a decompressed atmosphere.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.