Micro circuits with a sculpted ground plane
US6667549B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 1, 2002 |
| Grant date | Dec 23, 2003 |
| Priority date | — |
| Expiry date | May 1, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3011
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A sculpted groundplane is provided so that monolithic dielectric structures are effectively shielded from their immediate surroundings through the implementation of transversely elongated “vias” which form continuous walls that effectively enclose the circuit elements. Further, these walls incorporate a ground plane within this same substrate, which allows for the realization of such structures on a single substrate for microstrip devices, and for realization of stripline structures utilizing only two substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.