Patent · US Expired

Planar trimming resistor, applications and method for its manufacture

US6667683B1 · kind B1 · utility

5Cited by
7References
3Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 13, 2000
Grant dateDec 23, 2003
Priority date
Expiry dateJul 25, 2021

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01C7/22
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A trimming resistor is manufactured by depositing a resistive layer on a substrate, with a passivation layer having windows, and a contact layer which is in contact with the resistive layer via the windows. Trimming is carried out by interrupting the contact layer at narrow spots or regions. This invention has application for the manufacture of high-pressure sensors.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.