Holding device for an optical element made of a crystalline material

US6667839B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Jurgen Hartmaier · Aalen, DE
• Dietrich Klaassen · Oberkochen, DE
• Thure Boehm · Aalen, DE
• Bernhard Wergl · Steinheim, DE
• Michael Gerhard · Aalen, DE
• Jens Spanuth · Aalen, DE
• Ralf Kuschnereit · Oberkochen, DE
• Peter Vogt · Wien, AT
• Harry J. Bauer · Aalen, DE

Key dates

• Filing date: Dec 27, 2001
• Grant date: Dec 23, 2003
• Expiry date: Jan 7, 2022

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/505
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A device is used to hold an optical element, in particular one made of a crystalline material, in particular of CaF2, while the optical element is being coated, in particular by the vapor-deposition of at least one functional layer in a vacuum coating plant. The latter has a device for mounting the optical element, it being possible for the optical element to be heated in the vacuum coating plant via suitable radiation, in particular infrared radiation. An intermediate element which has a lower thermal absorption than the device for mounting the optical element is arranged between the device for mounting the optical element and the optical element.