Installation for processing wafers
US6670568B2 · kind B2 · utility
7Cited by
5References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 7, 2001 |
| Grant date | Dec 30, 2003 |
| Priority date | — |
| Expiry date | Jan 12, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An installation for processing wafers in at least one clean room is described. The installation has a configuration of production units for carrying out individual production steps and measuring units for inspecting the production steps. The production units and the measuring units are connected via a transport system for feeding and removing the wafers. At least one measuring unit together with an unloading station for delivering wafers to the transport system forms a measuring station, in which case wafers processed so as to be free of defects can be delivered from the measuring station separately from the remaining wafers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.