Integrated sound transmitter and receiver, and corresponding method for making same
US6670686B2 · kind B2 · utility
8Cited by
3References
34Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 16, 2002 |
| Grant date | Dec 30, 2003 |
| Priority date | — |
| Expiry date | Sep 16, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0042
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A transmitter or receiver includes several transducers formed opposite an aperture in a package. Each transducer includes a deformable semiconductor membrane that is capable of conducting current. The membrane is separated from a substrate zone by a cavity. This allows the membrane to deform due to the effect of an acoustic pressure or of a Lorenz force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.