Electrostatic zipper actuator optical beam switching system and method of operation
US6671078B2 · kind B2 · utility
73Cited by
12References
26Claims
0Family size
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Key dates
| Filing date | May 23, 2001 |
| Grant date | Dec 30, 2003 |
| Priority date | — |
| Expiry date | Oct 20, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/357
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A zipper actuator for optical beam control has an optical port formed through the substrate. The cantilevered beam of the actuator preferably includes a paddle for switching the optical signal. Mirror structures can be provided on the paddle for beam switching. In some embodiments, MEMS or electrode latches are further provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.