Patent · US Expired

Surface texture measuring instrument and a method of adjusting an attitude of a work for the same

US6671973B2 · kind B2 · utility

18Cited by
8References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 10, 2002
Grant dateJan 6, 2004
Priority date
Expiry dateMay 10, 2022

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01B7/34
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method of adjusting the relative attitude of a work in a surface texture measuring instrument for measuring the work having a feature region includes a measurement step of performing measurement of the feature region along an X-axis direction after positioning a detector in a Y-axis direction and the X-axis direction, a determination step of repeating the measurement which is performed while changing the position in the X-axis direction, and a step of adjusting the attitude of the work on the basis of the amount of relative attitude correction. Therefore, the direction of the feature region in the work is adjusted so as to be parallel to the Y axis.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.