Micromechanical oscillating device

US6672732B1 · kind B1 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Andreas Niendorf · Berlin, DE
• Wilhelm Frey · Palo Alto, US
• Karsten Funk · Stuttgart, DE

Key dates

• Filing date: Jul 17, 2002
• Grant date: Jan 6, 2004
• Expiry date: Jul 17, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B26/0841
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A vibrating microdevice, such as a vibrating micromirror, includes a vibrating structure which is connected to a supporting body via at least one spring structure in an at least a largely floating manner, the spring structure including at least one torsion-spring element defining a torsion axis and permitting a torsional vibration about the torsion axis to be induced in the vibrating structure, the spring structure also including at least one converter structure, which at least partially converts forces acting at least largely perpendicularly to the torsion axis on the torsion spring element into forces acting at least partially parallelly to the torsion axis on the torsion-spring element.